424 Works

B1.4 - Ultra-Thin Resistors for Piezoresistive Sensors

B. Schmidt, M. Zier, P. Philipp & J. Potfajova
Piezoresistors in silicon has found applications in different kinds of sensors, for example in pressure sensors, accelerometers, multi-axis flow sensors and tactile sensor arrays. The emerging use of piezoresistive elements for deflection sensing of scanning probe cantilevers in Atomic Force Microscopy (AFM) is governed by efforts to overcome limited speed imaging and throughput using monolithically integrated arrays of AFM cantilevers. Consequently, to the integration of the detecting piezoresistive sensor, electro-thermal actuator integration into the cantilever...

P2.3 - High Speed Measurement with EtherCAT and PC Based Condition Monitoring

P. Dresselhaus
text (Thep lemaseea ssutarertm heenret) of the current machine condition is getting more and more important in terms of the reduction of unplanned dead-times and cancellation expenses. The fast ethernetbased fieldbus system EtherCAT in combination with an intelligent controller software allow the integration of a Condition Monitoring system into a PC based controller. Beside cost savings this allows a registration and analysis of vibration data, in consideration of the current machine. The necessity of data...

P10 - Project of the Security Portals for Explosives Detection using CEAS Sensor

R. Mędrzycki, J. Wawer, Z. Bielecki, J. Mikołajczyk, J. Wojtas & M. Nowakowski
Detection of explosives is current problem for antiterrorist activities. This is particularly important for security of national buildings and installations. Explosives detection technology can be divided into two groups: sensor systems of trace amounts of explosives (Trace Detection) or of anomalies ones caused by presence of explosives charge (Bulk Detection). In the trace detection portals, there is examined the composition of contained air. If explosives are detected, the installed sensor will identify the chemical signature...

A6.3 - Sound Velocity Profiles in Fluids for Process Monitoring

M. Lenz & E. Kühnicke
In conventional methods the sound velocity is determined by means of the back wall echo or a reflector at a known position. This paper presents a novel approach for combined measurement of sound velocities and distances in fluids with scattering particles. In contrast to conventional methods, the knowledge about the sound field is exploited to characterise the fluid, and solely the echoes from the scattering particles are used to determine sound velocity. The basic idea...

2.2 - Robust and Miniaturized Non-Incremental Fiber-Optic Distance Sensor for Turbo Machine Rotor Deformation and Vibration Monitoring

P. Dreier, T. Pfister & J. Czarske
In order to improve the safety, the lifetime, and the energy efficiency of turbo machines, the dynamic behaviour of the rotor has to be analyzed and optimized. Thus, rotor unbalances, dynamic deformations, and blade vibrations as well as blade tip clearance changes have to be monitored during operation for optimizing the rotor design and to validate numerical models. However, these are big challenges for metrology, since small, robust, and noncontact measurement techniques are required offering...

B6.3 - Detection and Classification of Explosive Compounds in Presence of Interferents Utilizing Laser Ion Mobility Spectrometry

A. Langmeier, C. Oberhuettinger, W. Heep, H. Oberpriller, S. Beer, M. Kessler, J. Goebel & G. Mueller
Ion Mobility Spectrometers (IMS) are frequently used to screen airline passengers and their luggage for explosives and explosive by-products. Traditionally, in IMS technology different kinds of molecules are distinguished on account of their different ion mobilities in a weak electric field. In this paper we report on methods of resolution enhancement applicable to IMS drift time spectra. We find that a robust classification of trace explosives can be obtained by algorithmic resolution enhancement of the...

B4.2 - Novel Fiber-Optical Accelerometer for Monitoring Tasks of Power Generators

M. Villnow, M. Willsch, Th. Bosselmann & B. Schmauss
Due to the increase in energy demand modernizations of electric power plant installations become more and more important. To prevent damages and to verify optimization measures, sensors and monitoring systems are particularly essential. Therefore a novel fiber-optical acceleration sensor has been developed and proposed. The Siemens Fiber Optical Accelerometer (SFOA) is based on the intensity modulation of light. The end surface of a bare multimode fiber is placed towards a tilted mirror. Thereby the fiber...

2.4 - Tuneable Laser-Based Calibration and Characterisation of Radiometric Detectors for SI-Traceable Measurements

M. Schuster, A. Sperling & S. Nevas
SI-traceable values of the spectral responsivity of radiometric detectors are of the highest importance in many applications in photometry and radiometry. To determine them, spectral responsivity measurements are carried out under exposure to monochromatic radiation. The electrical response of the device under test (DUT) is compared to that of a reference detector. The responsivity of the reference detector is known from a calibration with respect to the absolute cryogenic radiometer, an electrical substitution radiometer used...

S2.1 - Gewerbliche Hochtechnologieausbildung für die Sensorik-Branche: Berufe und Bedarfe

Sabine Globisch
Diskussionen um den drohenden oder bereits spürbaren Fachkräftemangel begleiten die technologische Entwicklung in den Schlüsseltechnologien Biotechnologie, Mikrotechnologie, Nanotechnologie und optische Technologie in Deutschland bereits seit über einem Jahrzehnt. Dabei beziehen die Diskussion die gewerbliche und die akademische Ebene in gleicher Weise ein, denn es wird ein Mangel an ausgebildeten Ingenieuren genauso beklagt wie die fehlende Zahl an gewerblichen Fachkräften.

S1.2 - Hochschulszene Sensorik und Mikrosystemtechnik: Wer macht was wie?

Andreas Schütze
Die Hochschullandschaft in Deutschland ist vielfältig und entwickelt sich, insbesondere durch die umfangreichen Novellierungen und Reformen der letzten Jahre, stürmisch weiter. Neben dem viel diskutierten Bologna-Prozess, verbunden mit der Umstellung der Abschlüsse an Hochschulen auf das angelsächsische System der gestuften Bachelor-/Master-Abschlüsse, der in einem gesonderten Beitrag behandelt wird [1], entwickelt sich die Hochschullandschaft auch durch Schaffung neuer Studienangebote laufend weiter. Der Beitrag soll einerseits einen Überblick geben über Studiengänge, die spezifisch die Mikrosystemtechnik und damit...

I2.4 - Perception Range Prediction for IR Pilot Sight

Robert Weiss
The new helicopters of the Bundeswehr, the UH Tiger and the NH-90, are equipped with a far-infrared Pilot Sight Unit (PSU). This sensor is used for both navigation and obstacle avoidance. At the beginning of our project, there was no established procedure to predict the IR viewing range under given weather conditions. Aviation safety guidelines, however, require a pre-flight assessment of prevalent viewing conditions for a given sensor. A high priority project was started by...

1.1 - SensMiLi: Optical Absolute Position-Encoder by Single-Track, Q-ary Pseudo-Random-Sequences for Miniature Linear Motors

D. Wibbing, J. Binder, W. Schinköthe, Ch. Pauly, C. Gachot & F. Mücklich
Motivation In Industry sectors like the semiconductor-, electric light assembly or the biomedical-industry, in which work is carried out in clean environments, actuators are needed that can move small parts with an acceleration of several hundred m/s2 and a precision in the one-digit micrometer range. Miniature linear motors have the dimensional and dynamic characteristics to optimise these processes. However there has not been a sufficient solution for an absolute position encoder capable of being integrated...

B8.3 - Multifunctional, Laserinterferometric Measurement Systems

Walter Schott, Wolfgang Poeschel & Denys Dontsov
The trend in many fields of enabling technologies, such as microelectronics, communications, microsystems, and micromechanics, toward imposing increasingly stringent demands upon precision continues. Those types of technologies allow creating micromechanical components having dimensions of a few micrometers that have to be accurately measured, positioned relative to one another, and assembled. In that conjunction, laser-interferometric metrology provides unique opportunities that combine measurements over large ranges at extraordinarily fine resolutions with traceability of measurement results to international...

C4.2 - Energy efficient sensor nodes

Lars Binternagel
The phasing out of the traditional light bulb, starting in 2009, is very controversially discussed in engineering papers as well as on the consumer side. But this marks just one visible effect of many programs and research activities to reduce worldwide energy consumption by increasing the efficiency of electrical and electronic systems. The increase of efficiency is not only interesting for consumer goods with large volumes, but also for applications that are mobile and therefore...

A7.3 - Ultrasonic Sensor for Viscosity of Mineral Oil for Built-in Pipe Applications

B. R. Tittmann, H. S. Ju & E. J. Gottlieb
Ultrasonic methods have been developed to measure the viscosity elastic properties using the shear reflectance, and the mode conversion of the shear waves has been utilized for vegetable oil viscosity measurement by the relation between the shear properties and ultrasonic wave propagation. These methods have been restricted in pipeline applications, because for the protection from harsh fluid conditions such as high temperature and corrosion, ultrasonic transducers can be equipped with steel housings which restrict the...

A2.1 - Modeling and Signal Processing Approaches for SAW Chemical Sensors

G. Fischerauer
Microacoustic chemical sensors based, for instance, on quartz crystal microbalances (QCM) or surface acoustic wave (SAW) devices have been popular in laboratories around the world for almost 30 years. They have also met with some commercial success, and one of the underlying effects, viz., mass loading, is routinely used in thin-film technology to monitor film growth during deposition. This contribution aims at reviewing the principles of such sensors and the strategies applied to model the...

P5.3 - Efficient Calibration and Recalibration of Metal Oxide Gas Sensors by a New Mathematical Procedure

Rolf Seifert, Hubert B. Keller, Kevin Frank & Heinz Kohler
There is a growing need of economic online and in-situ field analysis applications like discriminated monitoring of toxic gas leakages, online monitoring of volatile components in chemical and biochemical processes, quality monitoring in food processing, etc. In this context, the isothermally operated metal oxide gas sensors (MOGs) with tin oxide as base material are manifold introduced due to their high sensitivity, long-term stability and low price. Their sensitivity to specific gas components, however, cannot be...

P5.2 - Evaluation of the Mutual Inductance of any Conductor Arrangements for Determining the Position

F. Wießner, Ch. Rückerl, K. F. Eichhorn & D. Plohmann
Inductive sensors of different works are already used in some areas of measurement and automation application. An inductive position sensor, for example, could be constructed by a moving transmitter coil and one or more fixed-receiver coils. The transmitting coil is supplied with an electric current. This can be analysed at the measured receiver coil signal. For the development of such position sensors, it is necessary to model the mutal inductance between two coils and to...

C5.1 - Possibilities and Limitations of Wireless Sensor Systems

J. Hefer, C. Brockmann & R. Thomasius
Wireless sensor systems open up a wide range of new measurement applications in different fields of applications in medical, industrial and research environment. Typical applications of sensing, data processing and communication can be found in ambient assisted living projects and condition monitoring scenarios. Self-contained energy supply and wireless communication, which both enable a very flexible topology and a cost-effective implementation in existing environments, allow to cover these scenarios. Miniaturized wireless sensors, designed using advanced packaging...

4.4 - Tiny Mid- and Long-Wave Infrared Spectrometer Mo¬dule with a MEMS Dual-Band Fabry-Pérot Filter

M. Ebermann, N. Neumann, S. Hoppe, K. Hiller, M. Meinig, St. Kurth & E. Gittler
Cost effective and highly miniaturized spectrometer modules for infrared absorption spectroscopy in the mid wave infrared (MWIR) based on the hybrid integration of pyroelectric detectors and MEMS Fabry-Pérot filters (FPF) have been developed and are commercially available. The filters, based on bulk micromachining and Si-SiO2 Bragg reflectors exhibit a high finesse up to 60 over the entire aperture of Ø 1.9 mm. However, many substances have strong and more specifiable absorption bands in the long...

P3.6 - The investigation of thrombus formation process by Lyapunov's index of scattered coherent radiation

M. S. Gavrylyak, S. G. Guminetsky, P. P. Maksimyak & P. M. Grygoryshyn
The results of experimental study of stochastization fluctuations of a coherent field intensity scattered by blood plasma are presented. It has been shown that time of thrombus formation can be defined by time dependence of Lyapunov' index of intensity fluctuations. It was discovered that time of thrombus formation of healthy people is smaller than ones sick by asthma.

1.4 - Internal Thermal Amplification for Increasing the Responsivity of Pyroelectric Detectors

Y. Querner, V. Norkus & G. Gerlach
This paper describes a new method for increasing the responsivity of pyroelectric detectors in voltage mode. A three-dimensional pattern is etched into the sensitive element. This leads to thicker electrical active areas and thinner electrical passive areas. In such a structure a lateral heat flux from thinner to thicker regions is generated due to faster heating of the thinner part based on minor thermal mass. This additional heat flow into the thicker electrically active areas...

OP13 - 3D-Terahertz-Tomography for Material Inspection and Security

Torsten Loeffler
The increasing use of novel materials and production technologies increase the demand for new nondestructive testing solutions. At the same time worldwide terrorism leads to a strong request for advanced security technology. Terahertz and millimeter-wave imaging (THz imaging) is a novel measurement technique, which can serve both application fields. However, in the past THz imaging was not mature enough to fulfill the numerous industrial and commercial needs. The main limitation was a limited dynamic range...

A8.1 - A Preisach Based Model for the Characterisation of Magnetic Hysteresis

Alexander Sutor & Reinhard Lerch
In this paper we present a model for hysteretic nonlinearities with non-local memories. This model can be used to describe hysteretic material behavior. Common applications are ferromagnetic or ferroelectric materials. Our model consists of an analytic function and a Preisach operator. Furthermore, we define a new Preisach weight function and introduce a method for the identification of the model parameters. Altogether, five parameters define the weight function and another two parameters are needed for the...

B8.3 - Application of Sacrificial Layers for the Modular Micro Sensor Fabrication on a Flexible Polymer Substrate

T. Griesbach, M. C. Wurz & L. Rissing
A concept for the fabrication of modular micro sensors on flexible substrates is presented in this paper. For the fabrication of micro sensors on flexible polymer substrates, investigations on sacrificial layers are essential, since it must be possible to release the sensors at the end of the fabrication process. This paper describes the development and fabrication of an anisotropic magneto-resistance (AMR) sensor on a 5 μm thick SU-8™ layer, which is an epoxy based photosensitive...

Registration Year

  • 2011
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