290 Works

C1.3 - Advanced Sensory Electronics and Systems with Self-x Capabilities by MEMS Switch Integration

M. Akmal Johar & A. Koenig
After entering mass application, more stringent requirements on flexibility, accuracy and dependability are imposed on sensory systems and their electronic embodiment. Analog static and dynamic reconfiguration, culminating in so called self-x features, e.g., self-trimming or -repairing, requires capable switch resources. While other switching solutions in electromechanical relays and CMOS switches have their own advantages and disadvantages, MEMS switches can become an alternative in switching solutions. Our research group focuses on applying and designing MEMS switches...

2.2 - Messsystem zur Bestimmung thermodynamischer Eigenschaften dünner Schichten bei hohen Temperaturen

H. Wulfmeier, D. Albrecht, H. Fritze, S. Ivanov & A. Bund
Die Kenntnis der thermodynamischen Eigenschaften dünner Schichten kann im Bereich der Sensorik oder zur Entwicklung von Dünnschichtsystemen genutzt werden. Um entsprechende Informationen zu erhalten, wurde eine neue Technik, die Dünnschichtkalorimetrie (Thin-Film Calorimetry, TFC), entwickelt. Dabei erlaubt der Einsatz hochtemperaturstabiler planarer Temperatursensoren eine Ausdehnung des Messbereichs bis etwa 1000 °C. Charakterisiert werden können einzelne dünne Schichten oder Dünnschichtsysteme. Das System basiert auf piezoelektrischen Resonatoren aus dem hochtemperaturstabilen Material Langasit, auf denen die zu untersuchenden dünnen Schichten...

A5 - Multilagenbasierte Lab-on-a-Chip Systeme – Online Überwachung und automatisiertes Handling

H. Stehr, R. Eger, V. Franke, F. Sonntag, K. Günther & U. Marx
Die vorliegende Arbeit beschreibt eine geschlossene Technologiekette für die schelle, flexible und preiswerte Herstellung von Lab-on-a-Chip-Systemen als Multilagenaufbau lasermikrostrukturierter Folien sowie einen Ansatz zur Sensitivitätssteigerung für die Online Fluoreszenz-Überwachung durch Integration funktionaler Reflexionsschichten. Aufbauend auf dynamischen Multi-Organ-Chips für die Substanztestung an langzeitkultivierten humanen 3D-Co-Kulturen wird ein Multilagen-Demonstrator-System vorgestellt und dessen Funktionalität am Beispiel der Substanztestung demonstriert. Weiterhin erfolgt die Vorstellung erster Ergebnisse zur Eignung von ta-C-Schichten als Reflektor.

A6.2 - Highly flexible absolute integrated encoder system on GMR-basis

B. Stritzke, Ch. Brode & M. Danowski
The cooperative project GMR-Flex is funded by the Federal Ministry of Education and Research (BMBF) within the support program “Microsystems 2004-2009”. The aim of the GMR-Flex project is the development of a GMR-based absolute rotary encoder system, which is flexibly scalable between module 0.2 and 4 and shaft diameters from 20 to 500 mm. One of the project’s primary objectives is an accuracy of 14 bits, which has solely been achieved by optical encoder systems...

4.1 - Intensity Referencing and Response Linearization in an Optical-Reflection-Based Distance Sensor System for White-Goods Applications

J. Baumer, J. Schenkl & M. Shamonin
A reflective optical sensor system for distance measurements in white–goods applications is presented. The technical solution implements a well-known intensity referencing principle - the optical bridge - in a low-cost design. The influence of the ambient temperature can be compensated for. The spurious effects such as slow output drift caused by aging of optical components or the variation of the system sensitivity due to the parameter spreading of system components can be successfully overcome as...

2.2 - Optical twist measurement by scatterometry

A. Hertzsch, K. Kröger & M. Großmann
To ensure that seals do not leak one of the main requirements for the shaft surface is the absence of twist structures. Twist is a periodic, generally thread-shaped microstructure which is superimposed on the roughness of the shaft surface and takes the form of waviness in the axial and circumferential directions. Using an optimized scattering geometry light scattering leads to an intensified mapping of the periodic twist structure of the shaft surface. The optical filtering...

A7.3 - Measurement System for the Characterization of Magnetic Actuators on the base of Magnetic Stray Fields

J. Franke, M. Brela & U. Pellkofer
Common defects in electromagnetic actuators due to the manufacturing process are heterogeneous magnetic properties of the materials, cracks and defects in the magnetic materials and parasitic air gaps in and directly around the magnetic circuit. Considering the high cost pressure, test systems must be adapted to the increasing complexity of the components and be able to detect defects completly in-situ. For these requirements the novel and non-destructive measurement system is suitable to monitor and assure...

D5.2 - Graphene and Carbon Nanotube Sensors of THz field

S. E. Shafraniuk
The THz field quantum dot sensors (T-sensors) made of graphene and carbon nanotubes have a very low detecting power, tiny dimensions, and they are tunable dynamically. The sensors simultaneously measure the THz field intensity, polarization, and spectrum. The graphene and carbon nanotube sensors exploit a change in the intrinsic transport properties of the quantum dot under influence of the photon-assisted resonant tunneling.

P5.3 - Machine-Vision-Based and Inertial-Sensor-Supported Navigation System for the Minimal Invasive Surgery

M. Kamil, M. Haid, Th. Chobtrong & E. Günes
The navigation of instruments, implants and patients in space has gained a broad acceptance for several years now. Especially in case of demand for minimal invasivity, navigated surgery has an enormous importance because of the decisive perceptual field expanding of the surgeons. The currently used systems in surgery are almost based on camera technology and image processing algorithms. The tracking solutions provide highly accurate three-dimensional position information of defined objects in space. On this basis,...

P5 - Filtered thermal contrast technique in thermographic non-destructive testing

S. Grys & W. Minkina
A new kind of thermal contrast, called “filtered contrast” is presented, which allows detecting and characterizing material defects using active thermography under some assumptions on physical and thermal parameters of materials. In opposition to known definitions of the thermal contrast, knowledge about defect-free area is not necessary and this contrast is less sensitive to nonuniformity of heat disposal to the material surface. The measurements were performed on an experimental setup equipped with a ThermaCAM PM...

L11 - Photometrischer MIR-ATR-Sensor für die Prozessanalyse

D. Geörg, M. Gornicki, D. Egly, F.-J. Methner & T. Beuermann
There is a strong demand for on-line monitoring in modern process automation. Transferring analytical methods from laboratory to production plants is still a problem, since for many laboratory devices do not exist corresponding process-capable measuring instruments. The developed MIR-ATR sensor solves this problem in case of FT-MIR spectroscopy (wavelength range 2.5 μm to 25 μm or wavenumber range 4000 cm-1 to 400 cm-1). A prototype of this sensor was constructed in order to determine the...

P12 - Comparison of Pyroelectric and Thermopile Detectors

N. Neumann & V. Banta
Thermal infrared detectors are distinguished by the advantages of a wide wavelength response, no requirement for cooling, high-temperature stability, high signal-to-noise ratio and low cost. Consequently, they are widely used in consumer products and in instrumentation. In the literature one can find many publications with regard to details either of pyroelectric detectors or thermopiles but a comparison of both thermal detectors could seldom be found. The main principles and the basic design of both the...

D4.3 - Development of an Universial Allergen Sensor System

A. Goehlich, K. Burmester, Y. Celik, R. Klieber, D. Greifendorf, N. Haas & H. Vogt
In this contribution we report on results of the Euregio funded project “Unihealth” that is dedicated to the development of a micromechanical sensor intended for the detection of important allergens. The “Unihealth” project aims at the development of a cost effective lable free bio sensor system that is intended for point of care applications concerning the detection of a large range of allergens e.g. the papain enzyme, gluten or allergens causing the peanut-allergy. The adopted...

D4.1 - Monitoring Cells and Spores by Biomimetic Sensors - Applications in Biotechnology and Biological Threat

F. L. Dickert, S. Can, R. Samardzic, H. F. Sussitz & U. Latif
Biological species such as cells are permanently changing their properties due to environmental conditions and nutrition. An innovative recognition strategy is based on patterning polymers with bioparticles of interest. Thus, cavities are generated which engulf e.g. cells and spores. An efficient enrichment of analytes on the surface of these coatings can be detected by QCMs (Quartz-Crystal-Microbalances). The mass-sensitive QCM data were compared with AFM (Atomic-Force-Microscopy) measurements, where e.g. Escherichia coli bacteria adhered on a sensor...

A9 - An application of a scanning light-addressable potentiometric sensor for label-free DNA detection

C. Wu, A. Poghossian, C. F. Werner, T. Bronder, M. Bäcker, M. J. Schöning & P. Wang
In this study, a scanning light-addressable potentiometric sensor (LAPS) was applied for label-free and direct electrical detection of DNA (deoxyribonucleic acid) hybridization for the first time. The functioning principle of the sensor is based on an electrostatic detection of the intrinsic molecular charge of DNA molecules together with an ion-concentration redistribution within intermolecular spaces. The LAPS signal shows a distinct dependence on the concentration of the complementary target DNA. The mechanism of the shift of...

A4.3 - The Infineon Silicon MEMS Microphone

A. Dehé, M. Wurzer, M. Füldner & U. Krumbein
This paper reports on the state of the art silicon micromachined microphone utilizing a dual poly silicon membrane system. MEMS chips from 1.4mm down to 1.0mm side length are applied for mobile communication. Design aspects related with key performance parameters such as sensitivity, signal to noise ration and distortion are discussed. Sensitivity of -38BV/Pa is achieved for different microphone membrane diameters. A maximum signal to noise ration of 66dB(A) for the largest system could be...

2.3 - Low-Cost Far-Infrared FPA based on High-Volume Pressure Sensor Process

M. Krueger & I. Herrmann
In order to achieve substantial cost reduction for far-infrared focal plane arrays (FPA), consequent adoption of existing high-volume MEMS processes is required. For that reason we used a high-volume pressure sensor process for fabrication of thermodiode FPA. While 1st Gen FPA successfully proved the suitability of the fabrication process, performance was strongly improved for the 2nd Gen FPA to meet customer demands for low-cost thermal imaging and thermal sensitivity of 270 mK @ f/1.0 and...

A5.2 - Studies of Adsorption and Complexation of Copper and Lead with Environmental Relevance with an Electrochemical Quartz Crystal Nanobalance

M. T. S. R. Gomes, A. Yamasaki & J. A. B. P. Oliveira
Electrochemical methods when performed on an electrode of a piezoelectric quartz crystal can give extra information on mass deposited and stripped from the electrode. Current and mass give complementary information about the electrochemical phenomena. Reagent and products adsorption, as well as the importance of transport mechanisms as diffusion, can be easily perceived by following one or both variables. The examples here shown of voltammetric methods performed on copper and lead solutions, using one of the...

D3.3 - Cell Culture Monitoring System Comprising Superoxide Sensors for Tumour Cell Analysis

H. Flamm, J. Kieninger, K. Aravindalochanan, G. A. Urban, E. Schleicher, A.M. Rostas & S. Weber
A sensor for the selective and sensitive measurement of reactive oxygen species (ROS) candidate superoxide was developed using direct electrochemical oxidation of superoxide radical on gold electrodes at low operation potential. Sensor performance regarding sensitivity and selectivity was investigated and optimised by integration of polymer based cut-off membranes. Sensor calibration was done utilising the artificial enzymatic based production of short-lived superoxide radicals by xanthine/xanthine oxidase system. The reaction kinetics of superoxide production was investigated with...

E8 - Modulares Condition Monitoring System zur Überwachung von Fluidqualität und Partikelkontamination am Beispiel von Öl

E. Pignanelli, T. Bley & A. Schütze
Ein miniaturisiertes mehrkanaliges Zustandsüberwachungssystem für technische Fluide wurde realisiert, um mittels nicht-dispersiver Infrarot (IR)-Absorption die Ölqualität zu bestimmen. Mit diesem System ist es möglich, mit entsprechender Anpassung der IR-Filter an verschiedene Basisfluide z.B. die Oxidation oder den Additivabbau in Schmierstoffen zu überwachen sowie eine zunehmende Wasserverunreinigung, die zu einer Verschlechterung der Fluideigenschaften führt, zu detektieren. Dieses System wurde exemplarisch bei einem Feldtest erprobt und der Verschleiß des Kühlschmierstoffes einer Schraubenpresse beurteilt. Dabei wurde eine eindeutige...

D9.4 - Estimating Muscular Activity of the Quadriceps Femoris Muscles by Measuring the Change in Shape

J. Hielscher, T. Meiss, R. Werthschützky & J. Block
This paper introduces a novel sensor concept for measuring muscular activity assessing the change of the skin surface curvature. The contraction of the rectus femoris muscle is expected to provide information on the user’s intention to rise from a chair. This information will be used for the control of a motorized lower limb orthosis to improve the quality of life of people suffering from muscle weakness. Electromyography is widely used for measuring muscular activity, but...

P10 - Cantilever Enhanced Photoacoustic Spectroscopy of Hair Microsamples

J. K. Lehtinen & T. A. Kuusela
We have demonstrated that a highly detailed infrared spectrum of single human hair fiber with length less than 1 cm can be measured using cantilever based photoacoustic detection. The smallest measured hair sample was approximately 0.5 mm in length and 50 μm in diameter. Different sample sizes have been measured and the effect of sample size to the signal-to-noise ratio (SNR) has been investigated. In addition, depth and length profiling spectra have been collected. Depth...

F17 - Mikrokontakt-Strukturierung von Platindünnschichten als Elektrodenmaterialien

F. M. Wisser, J. Grothe & S. Kaskel
Strukturierte Platinelektroden wurden durch Mikrokontaktdrucken eines polymeren Präkursors hergestellt. Der Präkursor besteht aus einem anpolymerisiertem Zitronensäure-Ethylenglycolester und Platinnitrat in verdünnter Salpetersäure. Die so hergestellten Interdigitalelektroden mit einer lateralen Auflösung von 20 μm wurden röntgenographisch und elektrochemisch charakterisiert. Die elektrochemische Gehaltsbestimmung von Wasserstoffperoxid ist mit diesen Platinelektroden ohne zusätzliche Referenzelektrode bis zu einem Gehalt von etwa 0,5 ppm (10 μM) möglich.

D7.3 - Calibration of In-line Acoustic Wave Viscosity Sensors for Measurement of Printing Inks

R. B. Haskell, J. Taku, J. Steichen & B. Witham
A thickness shear mode acoustic wave viscosity sensor has been developed for wide scale use in the flexographic printing industry. The sensor is based on the use of a two-port monolithic crystal filter bulk wave device and the correlation of loss to acoustic viscosity has been successfully used to control the viscosity of printing inks in high volume printing. The operation of the sensor is reviewed and the development of a calibration method to translate...

P1.6 - One-dimensional Orientation Using a Low-cost Inertial Sensor

M. Haid, T. Chobtrong, M. Kamil & E. Günes
This paper presents one-dimensional attitude estimation using a low-cost gyroscope with help of shaping filter for industry applications. This algorithm is a part of controller module, which will be implemented in an intelligent wrench for automotive manufacturing. The orientation is primary estimated by the signals of a low-cost pinpoint gyroscope. With help of an error model based on Shaping filter method, the optimal 1-D orientation of an object is determined by compensating the estimated orientation...

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  • 2013
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