275 Works

P5.8 - Light-stimulated hydrogel actuators with incorporated graphene oxide for microfluidic applications

L. Breuer, M. Raue, T. Mang, M. J. Schöning, T. Wagner & R. Thoelen
Graphene oxide (GO) nanoparticles, which are able to convert light energy into heat, were incorporated into temperature-sensitive Poly-N-isopropylacrylamide (P-NIPAAm) hydrogels. In contrast to pure P-NIPAAm hydrogels, the new polymers with GO showed significant sensitivity towards light as a stimulus. The photothermal conversion and heating process of hydrogels under illumination were investigated by IRthermography. Furthermore, first experiments for a possible application as light-driven microvalves within lab-on-chip systems were performed.

A1.2 - Processing and evaluation of measured data from Build-Up systems with special regard to various designs

M. Wagner & F. Tegtmeier
The largest force standard in Europe with a nominal force of 16.5 MN and an uncertainty of 1 x 10-4 is located in PTB, Braunschweig. Since there is a high demand for calibration in the meganewton range, this force scale needs to be exceeded. To realize this, the use of large bu-systems as transfer standards is considered [1]. A reliable uncertainty budget is a basic requirement for the traceability of force in the meganewton range...

D4.4 - Printed Sensor for Integrating in Aluminum during Casting

G. Dumstorff & W. Lang
We present a sensor with resistive structure integrated in aluminum. The sensor structures are realized on an aluminum substrate by screen printing. They are integrated in aluminum during casting. After fabrication the sensors were characterized by measuring the temperature dependent resistance.

02 - Sensitivity of VOC Sensors for Air Quality Monitoring within the EURAMET Key-VOC project

L. Spinelle, M. Gerboles, G. Kok & T. Sauerwald
The Air Quality Directive AQD sets the limit value for benzene at 5 μg/m³ over a calendar year which corresponds to the upper range of concentration measured in air quality monitoring. Currently, the sensitivity of sensors represents the major challenge for measuring benzene in the ppb range. In 2005, benzene levels in ambient air less than 100 ppb were out of the range of gas sensors. Nowadays, the technological progress resulted in an improvement of...

P8.4 - Switching-Type Lambda Sensor Manufactured by Joining of Sintered Zirconia via Glass Solder Paste

F. Schubert, St. Wollenhaupt, J. Kita, G. Hagen & R. Moos
This paper presents a planar switching-type lambda sensor fabricated by joining the heating and sensing components made of yttria-stabilized zirconia using a glass soldering paste. A way to produce a dense joining layer was found. The resulting sensor devices were compared with a sensor manufactured in a high temperature co-firing process and with a commercial sensor. The resulting sensor devices performed as expected and “switched” between lean and rich exhaust atmospheres.

D4.3 - Silicon probing tips coated with protective aluminum oxide thin films for fast tactile cantilever sensors

H. S. Wasisto, F. Yu, M. A. Deeb, L. Doering, U. Brand, A. Bakin, A. Waag, E. Peiner & St. Völlmeke
Silicon microprobe tips are fabricated and integrated with piezoresistive cantilever sensors for fast surface roughness scanning systems. A combination of wet and inductively coupled plasma (ICP) cryogenic dry etching processes is employed to create high-aspect-ratio tips. For the wear-resistant tip coatings, atomic-layer deposition (ALD) technique is applied to deposit conformal ~14 nm thick aluminum oxide (Al2O3) layers using a binary reaction sequence in low thermal process with precursors of trimethyl aluminum (TMA) and water (H2O)....

P7.11 - Neuartige Gold-Nanokomposite für chemiresistive Sensoren

Y. Daskal, R. Dittrich, C. Himcinschi, G. Gärtner, B. Abendroth, J. Walter & Y. Joseph
Wir haben neuartige Goldnanopartikelnnetzwerke mit verschiedenen aromatischen Molekülen (1,4-Benzenedithiol, 1,4-Benzenedimethanethiol, Biphenyl-4,4'-dithiol und p-Terphenyl-4,4''-dithiol) verlinkt auf silanisierten Glas oder Siliziumsubstraten entweder automatisch mit einer Durchflußzelle, oder manuell durch aufschleudern und lagenweise Selbstassemblierung hergestellt. Die resultierenden dünnen Filme sind mittels Röntgen-Photoelektronenspektroskopie charakterisiert worden. Die Messungen zeigten die chemische Zusammensetzung sowie den Vernetzungsgrad der Komposite. Oberflächenverstärkte Ramanspektroskopie, oberflächenverstärkte Infrarot-Absorption, Ellipsometrie und die UV/Vis-Spektroskopie wurden verwendet, um die optischen Eigenschaften der Komposite zu vermessen. Schließlich wurden die chemisensorischen Eigenschaften...

A7.1 - FLEXIBLE FREE STANDING SU-8 MICROFLUIDIC IMPEDANCE SPECTROSCOPY SENSOR FOR 3D MOLDED INTERCONNECT DEVICES APPLICATION

M.-P. Schmidt, A. Oseev, A. Brose, C. Engel & S. Hirsch
Current contribution reports a new microfluidic impedance spectroscopy sensor that is applicable for direct attachment on 3D molded interconnect devices (3D-MID). The Sensor is made of flexible SU-8 polymer featured by the system of electrodes structured directly on SU-8. Sensor chip is able to be directly soldered on MID due to electroless plated Nickel contact pads. Due to opposite electrodes design and one side direct shielded attachment, sensor is able to be applied for measurements...

D5.4 - A CMOS Based Polysilicon Nanowire Biosensor for Monitoring the Cardiovascular Disease Markers in Human Serum

I-S. Wang, C.-T. Lin, C.-C. Peng, J.-K. Lee, H.-H. Tsai & H.-H. Liao
This study demonstrates a polysilicon nanowire (poly-Si NW) biosensor platform is suitable for biomolecular analytes detection in human serum. Three biomarkers, such as cardiac-specific troponin-I (cTnI), N-terminal prohormone brain natriuretic peptide (NT-proBNP) and Interleukin 6 (IL-6), for cardiovascular diseases are examined. Compared with conventional examination methods, using polysilicon nanowire biosensor not only reduces the inspection time but also economizes the cost of diagnoses. Moreover, these biosensor platforms are made by a standard complementary metal-oxidesemiconductor (CMOS)...

C1.4 - Characterization of Si Mid-infrared Photonic Components for Chemical and Gas Sensing

U. Hedenig, T. Grille, G. A.D. Ritchie, J.M. Kirkbride, B Jakoby & V. Lavchiev
The paper discusses how, using proper design and modelling, IR-absorption sensors could achieve appropriate detection sensitivity, with micron- and submicron dimensions and to be integrated within asingle-platform device. Detailed material and structure characterization along with the employed technology is demonstrated for the recently fabricated prototypes. In our device concept, a MIR source emits electromagnetic (EM) field, coupled with a Si waveguide (WG). The latter operates as an interaction volume leading to partial absorption of energy...

P4.1 - Rotational Speed Direction Detection Based on the Output Duty Cycle of a Differential Hall Effect Gear Tooth Sensor

C. Lui, J.-G. Liu & J. Qiu
In this paper, a new method is proposed to use the duty cycle of the output signal from a differential Hall Effect gear tooth sensor for determining the rotational direction. The magnetic polarization of the detected differential magnetic field density is changed by changing the rotational direction of the target wheel. Therefore a variation in duty cycle of the electrical output signal is visible when the geometric duty cycle of the target wheel is designed...

P9.3 - Eine systematische Untersuchung von der Wechselwirkung zwischen Wolframtrioxid Gassensoren und Luftfeuchtigkeit

A. Staerz, S. Wicker, N. Barsan, U. Weimar & M. Epifani
In früheren Untersuchungen hatte Wolframoxid (WO3) sich als viel versprechend für die Atemgasanalyse erwiesen. Deshalb wurden in dieser Studie die Eigenschaften zweier WO3 Proben verglichen. Durch das Siebdruckverfahren wurden die WO3 Sensoren auf einem Al2O3-Substrat mit Platinelektrode gedruckt. Die Sensorsignale dieses Materials wurden gegenüber CO, NO2, Toluol und Aceton für verschiedene Temperaturen zwischen 250 °C und 400 °C gemessen. Um den Einfluss von Luftfeuchtigkeit zu bestimmen, wurden die Messungen jeweils in trockener synthetischer Luft und...

B2.3 - From Basic Flow Property to MEMS Multiparameter Sensors

R. Beigelbeck, S. Cerimovic, A. Talic, F. Kohl, A. Jachimowicz, T. Sauter, T. Voglhuber-Brunnmaier, B. Jakoby & G. Urban
Thermal sensors rely on a simple transduction principle. They exhibit the advantage of having a simple and easy-to-manufacture structure requiring no moving parts, which makes them robust, costeffective, and versatile. Consequently, they are widely used in many applications. This paper demonstrates how basic calorimetric flow and thermal parameter sensors, both based on silicon thinfilm technology, can be extended to more sophisticated devices by modifying the sensor layout or by altering the measurement method. In the...

C1.3 - Human Serum from Kidney Cancer Patients Analyzed with a New Sensitive Fast Liquid Differential Scanning Calorimetry Sensor

R. Splinter, A.W. A.W. Van Herwaarden & S. Pastorekova
Differential Scanning Calorimetry is being investigated as an analytical tool to detect cancer and other diseases by measuring the heat induced protein denaturation in blood plasma. This paper presents a much faster alternative method by using chip-based Fast Differential Scanning Calorimetry. Compared to standard Differential Scanning Calorimetry Fast Differential Scanning Calorimetry is able to reduce measurement time from hours to seconds. The latest development, a more sensitive chip has been tested with healthy control blood...

C8.3 - Optical tests on submarine and land vehicle periscopes in parallel with environmental tests

M. Honlet & K. Wehrenberg
Modern periscopes for submarines and armoured vehicles include components like daylight cameras, thermal cameras and laser range finders, often in addition to an optical channel for direct sight. Like any complex component which has been conceived for use in land and water vehicles, all periscopes must be subjected to tests under severe mechanical, thermal and climatic loading conditions. It is fundamentally important and safety relevant that the optical performance is maintained during such extreme conditions....

P1.3 - Inductance of a double-body compression spring as a favorable seat occupancy sensor

F. Wießner & K.F. Eichhorn
In this paper a method for dimensioning of inductive spring sensors is shown. This is done using an example of seat occupancy detection sensor of the automotive industry. It is in this case deals with the calculation of the individual components of the spring sensor. Thereby the crucial part for this is the calculation of the inductance of the spring sensor, because the components of the signal processing must be designed for them. Furthermore, it...

B5.1 - Flip-chip package for pressure sensors with operationtemperatures up to 500 °C

R. Zeiser, P. Wagner, S. Ayub, J. Wilde & S. Henneck
This work presents a novel flip-chip-package for pressure sensors that operate at very high temperatures. The packaging method is based on glass-soldering, gold stud-bumping and low-CTEceramic-substrates. The investigated sensor substrates were aluminiumnitride (AlN), siliconnitride (Si3N4) and a ceramic based on ZrSiO4 that was specific matched to the thermal-mechanical behavior of silicon. The sensor-element consists of thin-film platinum layers on a DRIE-etched silicon membrane. For the protection of the functional layer and the contact-metallization, the sensors...

P1.1 - Gasoline sensor based on ZnO

M.S. Aleksanyan, V.M. Arakelyan, V.M. Aroutiounian & A.G. Sayunts
ZnO+1at.%La gas sensitive thin films with different thicknesses were deposited on alumina substrate by the rf magnetron sputtering method using ZnO+1at.%La ceramic target prepared by us. Palladium catalytic particles and interdigited titanium contacts were deposited by ion beam sputtering method on the surface of the sensing layers. The response of semiconductor films to gasoline, toluene and dichlorethan vapors was measured at different operating temperature to 1000 and 2000 ppm gasoline vapor concentration. It was found...

A5.3 - Laser-Acoustic Characterization of Coatings

F. Singer
Non-destructive, contactless and robust characterization of coatings is an ongoing and challenging task in the development of measurement technologies. The determination of elastic material parameters of coating and substrate can serve as a convenient method for the characterization of coatings. In our measurement system, elastic material parameters were derived from the dispersion of surface acoustic waves. The ultrasound waves were excited in the thermoelastic regime using a pulsed laser and were measured in the near-field...

P2.8 - PoreGenic® - Patch-on-Chip-System für die präklinische Forschung an Ionenkanälen - Teil II

C. Tautorat, U. Scheffler, D. Franz, T. Kröger, P. J. Köster, W. Baumann, O. Klink & H. Beikirch
Beim aktuellen Entwicklungsstand unseres PoreGenic® Patch-on-Chip-Systems wurden für Signalableitungen von adhärenten Zellen die pipettenähnlichen Patch-Sites auf 10 μm verlängert und eine Zellpositionierung etabliert. Nach unserem Kenntnisstand ist es uns damit weltweit erstmalig gelungen, adhärente Säugetierzellen mit einem automatisierbaren Patch-on-Chip-System zu untersuchen. Systemaufbau und Chipherstellung sind die Kernthemen dieses Beitrags. Als Anwendungsbeispiele werden Patch-Clamp-Untersuchungen an menschlichen embryonalen Nierenzellen HEK 293 NaV 1.7 sowie primären hippokampalen Neuronen von Mäusen vorgestellt.

P7.9 - Flexible Einweg-Sensorchips für das Zell Monitoring getestet mit lebenden Zellen

N. Mzoughi, M. Remm, B. Neumann, H. Grothe & B. Wolf
Multiparametrische Zell-Monitoring Sensor-Chips ermöglichen innerhalb weniger Tage patientenindividuelle in-vitro Chemosensitivitätstests an Biopsiematerial für eine effektive Tumortherapie. Wir berichten über biegsame und kostengünstige Sensorchips die mittels Drucktechnologie auf Polymer-Substraten hergestellt werden können. Die Tauglichkeit der gedruckten Chips für Zellmessungen wird durch diverse Tests verifiziert. Die Eignung von innovativen SWCNT (single wall carbon nanotube) basierten pH- und Sauerstoff Sensoren für das Monitoring von Zell-Aktivität wird durch Messungen mit lebenden Hefezellen demonstriert.

C6.4 - Tactile and Non-contact Sensors for Coordinate Measuring Technology

R. Christoph & I. Schmidt
Coordinate measuring machines provide the most flexible technical solutions for dimensional measuring. Due to the possibility of combining several sensors in one machine, multisensor coordinate measuring machines are of particular advantage. When choosing the sensors for an application, the conditions of the measurement object, such as the dimensions of the features to be measured, surface characteristics as well as required accuracy, must be taken into consideration. The talk gives a short overview over the basic...

D6.1 - Universal and Dynamically Reconfigurable Sensor Interface in Lab-on-Spoon Multi-Sensor System

R. Freier & A. König
Surging application fields of integrated electronics and sensors, as e.g., automation, internet of things (IoT), cyber-physical(-production) systems (CP(P)S), or Industry 4.0, require more able, versatile, and dependable sensor electronics and systems. In particular, cost effective features of self monitoring, -calibration, trimming, or -healing are sought after. State-of-the-art integrated components for sensor signal conditioning are usually not generic and dedicated to specific sensors or applications and are not offering self-x capability. Thus, based on a survey...

P5.1 - Miniaturisierter durchstimmbarer optischer μ-Flussratensensor

C. Höra, M. M. Skadell, S. A. Pfeiffer, M. Pahl, D. Belder, Z. Shu & E. Beckert
In dieser Arbeit präsentieren wir den ersten auf einer lumineszierenden Sensorschicht basierenden und damit optisch auslesbaren mikrofluidischen kalorimetrischen Flussratensensor. Mit Hilfe dieser integrierten Schicht kann die Temperatur unabhängig von diskreten Sensorpunkten im gesamten Kanal evaluiert werden, was enorme Vorteile für die Sensitivität des Sensors bei verschiedenen Flussraten hat. Der Wärmeeintrag wird über ein auf PET gedrucktes Heizelement realisiert, welches ebenfalls in den Chip integriert wurde. Das System wurde hinsichtlich der Reproduzierbarkeit des Messsignals gründlichcharakterisiert. Sensitivitätsuntersuchungen...

P7.2 - NIR spectroscopy based method for charactisation of biological tissue

M. Lange, T. Reuter, F. Meuche & M. Hoffmann
We present a Near Infrared Spectroscopy (NIRS) based method for characterisation of biological tissue under mechanical load. In this study we measured NIR spectra of equine cartilage bone samples with simultaneous application of mechanical load. Our goal is to gain more information about the functional behaviour of cartilage tissue to support cartilage therapy.

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  • 2015
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