Construction of microfluidic biochips with enhanced functionalities using 3D femtosecond laser direct writing

Midorikawa, K.; Laser Technology Laboratory, RIKEN-Advanced Science Institute, Hirosawa 2-1, Wako, Saitama 351-0198, Japan, Sugioka, K.; Laser Technology Laboratory, RIKEN-Advanced Science Institute, Hirosawa 2-1, Wako, Saitama 351-0198, Japan, Qiao, L.; State Key Laboratory Of High Field Laser Physics, Shanghai Institute Of Optics And Fine Mechanics, Chinese Academy Of Sciences, P.O. Box 800-211, Shanghai 201800, China, Liao, Y.; State Key Laboratory Of High Field Laser Physics, Shanghai Institute Of Optics And Fine Mechanics, Chinese Academy Of Sciences, P.O. Box 800-211, Shanghai 201800, China, He, F.; State Key Laboratory Of High Field Laser Physics, Shanghai Institute Of Optics And Fine Mechanics, Chinese Academy Of Sciences, P.O. Box 800-211, Shanghai 201800, China & Cheng, Y.; State Key Laboratory Of High Field Laser Physics, Shanghai Institute Of Optics And Fine Mechanics, Chinese Academy Of Sciences, P.O. Box 800-211, Shanghai 201800, China
The extreme nonlinear interaction betweenfemtosecond laser pulses and large-band-gapmaterials has enabled three-dimensional (3D)microfabrication inside transparent materials. In thepast decade, this technique has been used forcreating a variety of functional components in glassmaterials, including microoptics, microfluidics,microelectronics, micromechanics, etc. Using thesebuilding blocks, femtosecond laser microfabricationalso allows for construction of highly integratedmicrodevices. Here, we provide an overview of ourlatest progress made along this direction, includingfocal spot engineering and nanofluidic fabrication.In particular, we show that 3D micro-/nano-fluidiccomponents with arbitrary...