Laser-induced chemical liquid-phase deposition of copper on transparent substrates

Von Arx, U.; Department Architecture, Wood And Civil Engineering, Bern University Of Applied Sciences, Solothurnstrasse 102, CH-2500 Biel, Switzerland, Schwaller, P.; Institute For Applied Laser, Photonics And Surface Technologies, Bern University Of Applied Sciences, Pestalozzistrasse 20, CH-3400 Burgdorf, Switzerland, Neuenschwander, B.; Institute For Applied Laser, Photonics And Surface Technologies, Bern University Of Applied Sciences, Pestalozzistrasse 20, CH-3400 Burgdorf, Switzerland & Zehnder, S.; Institute For Applied Laser, Photonics And Surface Technologies, Bern University Of Applied Sciences, Pestalozzistrasse 20, CH-3400 Burgdorf, Switzerland
Laser-induced chemical liquid phase deposition allows maskless manufacturing of metallic structures on the surface of dielectrics and is prospected to be a promising tool in the field of microelectronics and microfluidics. The aim of the work presented here is to combine this deposition method with a related micro-structuring method known as laser-induced backside wet etching. Fabricating both, microstructured surface structures and subsequent deposition of conducting patterns within the same setup would be an interesting tool...