Photon Synthesis of Nanometric Films Based on Transitional Metal oxides for Multi-Parameter Sensors

Mulenko, S.A.; Institute For Metal Physics NAS Of Ukraine, 03142, Kiev-142, Ukraine, Valerini, D.; University Of Salento, Department Of Physics, 73100 Lecce, Italy, Caricato, A.P.; University Of Salento, Department Of Physics, 73100 Lecce, Italy & Luches, A.; University Of Salento, Department Of Physics, 73100 Lecce, Italy
The reactive pulsed laser deposition (RPLD) based on a KrF laser was used for photon synthesis of nanometric iron and chromium oxides films. RPLD allows controlling the thickness and stoichiometry of deposits with definite band gap. So RPLD was used for synthesizing nanometric iron and chromium oxides films for thermo-photo-chemical sensors. We compared sensing properties of iron and chromium oxides nanometric films deposited on <100>Si substrate by RPLD. These iron and chromium oxides films have...