DEVELOPMENT OF MICRO-SCALE HIGH ASPECT RATIO PATTERNED FEATURES WITH ELECTROLESS NICKEL PLATING

Lorli Smith
This thesis describes a novel method designed to pattern high aspect ratio metallic microscale features using a modified photolithography and electroless nickel plating process. This method utilizes modified photolithography techniques to create a polymer mold that is used to control the location of metal deposition on substrate during electroless nickel plating. In order to generate high aspect ratio mold features, a multiple spin-step process was developed to deposit thick layers of SU-8 photoresist, and inclined...
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