Wafer Defect Microscopy Enhancement using Perceptually Motivated Super-Resolution Convolutional Neural Networks [dataset]

Russell Maguire
The silicon super-resolution (SiSR) network is a new convolutional neural network for enhancing the inspection of defects in silicon devices. This paper demonstrates how the proposed SiSR network is able to upscale microscopy images of patterns and defects by x4 in each direction, aiding inspection in small--medium scale device fabrication. The alignment cameras of a laser-writer were repurposed to capture a large dataset of patterned wafer microscopy examples at two different magnification factors, but small...
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