Size-dependence of the dielectric breakdown strength from nano- to millimeter scale

Claudia Neusel & Gerold A. Schneider
Dielectric breakdown decisively determines the reliability of nano- to centimeter sized electronic devices and components. Nevertheless, a systematic investigation of this phenomenon over the relevant lengths scales and materials classes is still missing. Here, the thickness and permittivity-dependence of the dielectric breakdown strength of insulating crystalline and polymer materials from the millimeter down to the nanometer scale is investigated. While the dependence of breakdown strength on permittivity was found to be thickness-independent for materials in...
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