Design of a cyber-physical production system for semiconductor manufacturing

Sophia Keil
Due to the highly dynamic markets, an increasing complexity, and individualization of products, efficient and robust logistical processes are difficult to achieve through the use of central planning and control approaches. The aim of the contribution is the design of a decentralized, autonomous control system for high tech production systems. An interdisciplinary perspective was adopted as methods of artificial intelligence and mechanical as well as electrical engineering were used. The results are a hardware concept...
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