Slice thickness optimization for the focused ion beam-scanning electron microscopy 3D tomography of hierarchical nanoporous gold

Alexander Shkurmanov, Tobias Krekeler & Martin Ritter
The combination of focused ion beam (FIB) with scanning electron microscopy (SEM), also known as FIB-SEM tomog raphy, has become a powerful 3D imaging technique at the nanometer scale. This method uses an ion beam to mill away a thin slice of material, which is then block-face imaged using an electron beam. With consecutive slicing along the z-axis and subsequent imaging, a volume of interest can be reconstructed from the images and further analyzed. Hierarchical...
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