Parallel diffractive multi-beam ultrafast laser micro-processing

Z Kuang
During the last decade, ultrashort pulse lasers have been employed for high precision surface micro-structuring of materials such as metals, semiconductors and dielectrics with little thermal damage. Due to the ultra high intensity of focussed femtosecond pulses (I > 1012W/cm2), nonlinear absorption can be induced at the focus leading to highly localised material ablation or modification. This is now opening up applications ranging from integrated optics, through multi-photon induced refractive index engineering to precision surface...
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