Silicon and Dielectric Dry-Etch Recipes
Thomas Robert O'Brien Jr., Edmond Chow, Klara Nahrstedt, Bruce Lewis & John Michael Dallesasse
This work contains a series of SEM images and descriptions describing various etches used commonly for dielectrics (SiNx, SiO2) and Si. Some are failures, some are successes. Each was taken on the S4800 Hitachi SEM in the Micro and Nano Technology Lab at the University of Illinois at Urbana-Champaign during the RET taking place the summer of 2016.
This data repository is not currently reporting usage information. For information on how your repository can submit usage information, please see
our documentation.