Czochralski grown (AlxGa1-x)2O3 crystals with variable Al content
P.N. Butenko, D.I. Panov, A.V. Kremleva, D.A. Zakgeim, A.V. Nashchekin, I.G. Smirnova, D.A. Bauman, A.E. Romanov & V.E. Bougrov
We propose a technuque of liquid-phase growth of (AlxGa1-x)2O3 crystals with
variable and controlled Al content in them. When using the Czochralski growth process
Ga2O3 melt was dosed by sapphire seed. By applying of the special growth zone and the
regulating the process parameters, a series of crystal samples with Al content varying from
0.51 to 4.68 % at. was obtained. In addition to the standard setting of the geometry and weight
of the crystals...
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