Fabrication of surface plasmon waveguides on Cytop

Richard Daviau
This thesis discusses Surface Plasmon waveguides on Cytop and is divided into two topics. The first topic covers the fabrication and physical characterization of thin metal stripe waveguides on Cytop. The fabrication process is fully described and generally consists of a Cytop layer deposition and cure process and a bi-layer metal liftoff process. Physical characterisation was conducted on structures having undergone intermediate process steps and on finished structures, and results are presented and discussed. Optical...
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