Microfabrication of Plasmonic Device: PPBG BIosensor in Cytop, Reflection Itensity Modulator and Atomically Flat Nanohole Array

Sa'ad Hassan
This thesis details the fabrication of three different plasmon-polariton based devices: a plasmon-polariton Bragg grating (PPBG) biosensor, an intensity modulator incorporating grating couplers, and optically separated electrical contact, and finally an array of nanoholes in an ultrasmooth Au film. The biosensor involves a 35 nm Au stripe, lithographically stepped in width to produce a Bragg reflector. The waveguide is embedded in symmetric, Cytop claddings 8 µm thick. Channels are etched into the top cladding, exposing...
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