Addressing the Challenges of Silicon Waveguides with Subwavelength Nanostructures

Przemek J. Bock
Planar waveguide devices have been made progressively smaller, resulting in higher integration density, more functions on a single chip, greater yields and lower cost. In particular, the high refractive index contrast (Δn ~ 2) of the silicon-on-insulator (SOI) material platform permits waveguide bend radii as small as a few micrometers, thereby markedly reducing device size. However, high field intensity at the waveguide core-cladding boundary increases scattering loss from fabrication imperfections on the waveguide sidewall. For...
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