Numerical optimization of adhesive mounted MEMS pressure sensors

Andreas Dörfler, Gregor Feiertag, Matthias Schmidt, Andreas Rüdiger & Ulrich Wagner
Our research addresses time-dependent hysteresis effects in adhesive packaged MEMS pressure sensors.Typically calibrated inside a certain temperature and pressure range, they provide precise pressure measurements, giventhat certain setting times after temperature changes are maintained. Signal errors arise when temperature changesinduce time-dependent viscoelastic relaxation in the adhesive which cannot be compensated by calibration. High precisionapplications which demand absolute signal accuracies below 30Pa on chips well below 1mm scales, while the requirementof factory calibration before soldering demands...
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