High-throughput and high-precision laser micromachining with ps-pulses in synchronized mode with a fast polygon line scanner

Beat Jaeggi, Beat Neuenschwander, Markus Zimmermann, L. Penning, R. DeLoor, K. Weingarten & A. Oehler
To be competitive in laser micro machining, high throughput is an important aspect. One possibility to increase productivity is scaling up the ablation process i.e. linearly increasing the laser repetition rate together with the average power and the scan speed. In the MHz-regime high scan speeds are required which cannot be provided by commercially available galvo scanners. In this work we will report on the results by using a polygon line scanner having a maximum...
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