Observation of fracture and plastic deformation during indentation and scratching inside the scanning electron microscope

R. Rabe, J.-M. Breguet, Patrick Schwaller, S. Stauss, F.-J. Haug, J. Patscheider & J. Michler
During nanoindentation measurements of thin films the formation of cracks within the film as well as of pile-up or sink-in around the indent are known to affect significantly the precision of hardness and Young's modulus values. The crack pattern in brittle films and the amount of pile-up/sink-in in ductile films allow, however, also to estimate film fracture toughness and to gain knowledge on the film strain hardening behavior, respectively. The shape of the residual imprint...
This data repository is not currently reporting usage information. For information on how your repository can submit usage information, please see our documentation.