Technique for Large-Scale EBSD Mapping of Polycrystalline Silicon

Harvey Guthrey & Brian Gorman
The use of the electron backscattered diffraction (EBSD) technique to create maps of polycrystalline materials is generally limited to areas less than a square millimeter. In order to map larger areas, steps must be taken to address issues such as specimen preparation of large surface areas and orientation of these large specimens so they can be mounted appropriately in the microscope. Issues related to scanning areas larger than the SEM field of view and incorporating...
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