Improved tungsten nanofabrication for hard X-ray zone plates

Karolis Parfeniukas, Jussi Rahomäki, Stylianos Giakoumidis, Frank Seiboth, Felix Wittwer, Christian Schroer & Ulrich Vogt
Microelectronic engineering 152, 6 - 9(2016). doi:10.1016/j.mee.2015.12.015
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