P-N junction-based Si biochips with ring electrodes for novel biosensing applications

Mahdi Kiani, Nan Du, Manja Vogel, Johannes Raff, Uwe Hübner, Ilona Skorupa, Danilo Bürger, Stefan E. Schulz, Oliver G. Schmidt & Heidemarie Schmidt
In this work, we report on the impedance of p-n junction-based Si biochips with gold ring top electrodes and unstructured platinum bottom electrodes which allows for counting target biomaterial in a liquid-filled ring top electrode region. The systematic experiments on p-n junction-based Si biochips fabricated by two different sets of implantation parameters (i.e. biochips PS5 and BS5) are studied, and the comparable significant change of impedance characteristics in the biochips in dependence on the number...
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