Dataset: Electron ptychography achieves atomic-resolution limits set by lattice vibrations

Zhen Chen, Yi Jiang, Yu-Tsun Shao1, Megan Holtz, Michal Odstrcil, Manuel Guizar-Sicairos, Isabelle Hanke, Steffen Ganschow, Darrell Schlom & David Muller
Raw input data (Matlab mat format). Transmission electron microscopes use electrons with wavelengths of a few picometers, potentially capable of imaging individual atoms in solids at a resolution ultimately set by the intrinsic size of an atom. However, owing to lens aberrations and multiple scattering of electrons in the sample, the image resolution is reduced by a factor of 3 to 10. By inversely solving the multiple scattering problem and overcoming the electron-probe aberrations using...
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