Effects of air cavity in dynamic pressure sensors: Experimental validation

© 2020 by the authors. Licensee MDPI, Basel, Switzerland. T. An air-backed diaphragm is the key structure of most dynamic pressure sensors and plays a critical role in determining the sensor performance. Our previous analytical model investigated the influence of air cavity length on the sensitivity and bandwidth. The model found that as the cavity length decreases, the static sensitivity monotonically decreases, and the fundamental natural frequency shows a three-stage trend: increasing in the long-cavity-length...
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