Die lagerlose Pumpe für hohe Fluidtemperaturen

Tobias Wellerdieck
Bearingless motors consist of a drive system with an integrated magnetic bearing and are used in centrifugal pumps for high purity applications. The machine is constructed without the use of a drive shaft, dynamic seals, and conventional mechanical bearings, since the rotor is levitated in a magnetic field. This allows for a wear-free operation and prevents the contamination of process fluids. Bearingless pumps are employed in wet chemical etching processes in the semiconductor industry, since...
This data repository is not currently reporting usage information. For information on how your repository can submit usage information, please see our documentation.