Ablation of Dielectrics without Substrate Damage Using Ultra-Short-Pulse Laser Systems

M. Bähr, G. Heinrich, K.-P. Stolberg, T. Wütherich & R. Böhme
25th European Photovoltaic Solar Energy Conference and Exhibition / 5th World Conference on Photovoltaic Energy Conversion, 6-10 September 2010, Valencia, Spain; 2490-2496
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