Optical Transmission Spectroscopy as Real Time Process Control for Thin-Film Silicon PECVD

M. Meier, S. Muthmann, G. Dingemans, M.C.M. Van De Sanden, M. Schulte & A. Gordijn
25th European Photovoltaic Solar Energy Conference and Exhibition / 5th World Conference on Photovoltaic Energy Conversion, 6-10 September 2010, Valencia, Spain; 2971-2974
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