Layer Properties in PECVD Reactor for Micromorph® Solar Modules

M. Klindworth, D. Chaudhary, C. Goury, S. Jost, A. Salabas, A. Stoeckle, G. Tipaka, A. Taha & Ch. Ellert
25th European Photovoltaic Solar Energy Conference and Exhibition / 5th World Conference on Photovoltaic Energy Conversion, 6-10 September 2010, Valencia, Spain; 3280-3282
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