Growth of (111) oriented thin film platinum by room temperature sputtering

Philippa Shepley
This application note describes the growth Pt thin films in the Royce Deposition System. X-ray reflectivity and diffraction shows that these sputtered Pt thin films have low surface roughness and are (111) textured. These properties are desirable for the growth of Pt in magnetic multilayers and as seed layers for other materials.
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