1.2.4 Gas-Assisted Focused Ion Beam Fabrication of Gold Nanoelectrode Arrays in Electron-Beam Evaporated Alumina Films for Biosensing Applications

Napat Triroj, Papot Jaroenapibal & Roderic Beresford
This work reports the fabrication details used to prepare gold nanoelectrode arrays in alumina substrates. The fabrication steps include electron-beam evaporation of 20-nm Ti and 300-nm thick Au for the electrode platform on a glass substrate, followed by electron-beam evaporation of 800-nm thick Al2O3 as a passivation layer. I2-assisted focused ion beam (FIB) milling is employed to create high-aspect-ratio pores in the alumina films. The final pore size of 60-120 nm is achieved by ion...