1.5.1 Quantitative Evaluation of Nanoelectrochemical Properties of Thin Film Transistor based Chemical Sensors

G. C. Whitfield & H. L. Tulle
The electric field effect is known to influence the sensitivity of gas sensors based on chemisorption processes occurring on semiconducting metal oxides. In addition, these conductive structures are known to become more sensitive to the environment when patterned into nanoscale cross-sectional dimensions. However, quantitative models of the relationship between nanostructure, electric field, and chemisorption have not been established. In this work, these relationships are thoroughly investigated in nanoscale device structures by means of numerical simulation...