1.5.3 Environmental Hardness of Pt-Ti-O gate Si-MISFET Hydrogen Gas Sensors from Siloxane, Humidity, and Radiation

T. Usagawa, Y. Kikuchi, A. Nambu, A. Yoneyama, K. Ueda & A. Watanabe
Platinum-titanium-oxygen (Pt-Ti-O) gate Si-MISFET hydrogen gas sensors have been found to show large sensing amplitude (delta Vg) of 624.4 mV with sigma delta Vg of 7.27 mV for nine repeated measurements even under nitrogen-diluted 1.0% hydrogen gas, which are nearly the same values of 654.5 mV with sigma delta Vg of 3.77 mV under air-diluted 1.0% hydrogen gas. The Pt-Ti-O sensor devices can work stably as hydrogen sensors up to about 300 °C and also...