2.1.5 Gas Sensor MEMS Platform for Harsh Conditions

A. A. Vasiliev, A. S. Lagutin, A. V. Pisliakov, N. P. Zaretskiy, N. N. Samotaev, A. V. Sokolov, S. A. Soloviev, A. S. Lipilin & A. M. Mozalev
We present a novel approach to the fabrication of MEMS devices, which can be used for gas sensors operating in harsh environment in wireless and autonomous information systems. MEMS platforms based on ZrO2/Y2O3 (YSZ) and alumina membranes are applied in these devices. The methods of fabrication of these ceramic MEMS devices are considered. It is shown that the application of such membranes permits a decrease in MEMS power consumption at 4500 °C down to ~75...