2.3.1 Xylene Sensor Using Double-layered Thin Film and Ni-Deposited Porous Alumina

Tomo Akiyama, Yurie Ishikawa & Kazuhiro Hara
A xylene sensor using a double-layered metal-oxide thin film and a Ni-catalyst deposited on a porous alumina is presented. The sensing film has double-layered structure; the first layer is Fe2O3 + TiO2(5mol%) + MgO(4mol%), and the second layer is WO3 + TiO2(10mol%). The thickness of the first layer and the second layer is 200nm and 70nm, respectively. Both the sensitivity and the stability are improved by adopting double-layered structure. The Nideposited porous alumina is placed...