2.3.2 Photo-assisted Aromatic VOC Sensing by a p-NiO:Li/n-ZnO Transparent Heterojunction Sensor Element

Y. Nakamura, Y. Morita, S. Fujitsu, Y. Ishikura & H. Takagi
p-NiO/n-ZnO transparent heterojunction diode is prepared by the continuous film deposition using RF magnetron sputtering technique and processed into a chemical sensor element by photolithography pattering and chemical etching. This structurally designed p-NiO/n-ZnO junction diode, whose junction interface is exposed to the atmosphere, has a response to VOCs (volatile organic compounds) in atmosphere. Furthermore, its VOC sensing performance is extremely enhanced when the sensor element is operated under deep UV light irradiation (<300nm). Independent of...