2.3.5 Large-Scale Integration of Nanomechanical Sensors

S. Evoy
Rapid analysis of biological molecules is of great importance to many biomedical applications. Mechanical resonators have been demonstrated as highly sensitive transducers for the detection of molecular systems. Akin to the concept of chemoresistive electronic noses, large arrays of nanomechanical resonators would enable the development of nanoresonator-based ‘electronic ears’ for the fingerprinting of metabolomics systems. We will present a review of our work involving the large scale integration of nanoresonating sensors, and their application for...