2.4.3 Structural Factors Influencing the Volatile Sensitivity of Polymer Coated Piezoelectric Micromechanical Resonators

Ling Sieben-Xu, Devrez M. Karabacak, Daan Wouters, Woot Knoben, Y. Van Andel, Sywert H. Brongersma & Mercedes Crego Calmama
Polymer-coated piezoelectric microbridge resonators were demonstrated to be highly sensitive towards volatile organic compounds. Here, we present a comprehensive experimental study into several important factors governing the modal sensitivity, namely the modal resonance frequency, piezoelectric transducer size, and functionalization layer thickness. Results indicate the lower frequency length flexural modes yield higher normalized frequency shifts in comparison to higher order width-flexural or torsional modes. The sensitivity of resonator sensors can be further enhanced by reducing the...