2.4.5 Silicon Cantilever Resonators Integrated with Portable Electrostatic Samplers for Sensing and Characterizing Engineered Nanoparticles in Workplace Air

S. Merzsch, H.S. Wasisto, A. Waag, E. Peiner, I. Kirsch, E. Uhde & T. Salthammer
A portable cantilever-based nanoparticle detector (CANTOR) is developed and manufactured for sensing engineered nanoparticles (ENPs) in workplace air by monitoring the resonant frequency shift induced by the mass of the particles trapped on the resonator. A piezoresistive Wheatstone bridge and a miniaturized electrostatic sampler are integrated with the cantilever resonator for signal sensing and ENP collection, respectively. By using the first higher harmonic bending frequency, the sensor exhibited a mass sensitivity of 36.51 Hz/ng, which...