3.5.3 High Polarization HfO2 Sensing on K+ for Inflammasome Cell Detection Application

Pei-Wen Liao, Kuan-I Ho, Jer-Chyi Wang, Chao-Sung Lai, Sheng-Hui Tsai, Hsin-Chih Lai & Cheng-En Lue
In this study, a novel method was proposed to detect the inflammasome activation from extracellular potassium ion concentration. The sensor platform was designed as the electrolyte insulator semiconductor (EIS) structure with fluorinated HfO2 sensing membrane. The potassium (K+) sensitivity of HfO2-EIS structure is 10.28 mV/pK in the concentration between 10^-5 M and 1 M. For the samples with fluorine (F19+) ion implantation, the pK sensitivity can be effectively improved to 56.02 mV/pK. The variation of...