3.5.4 Multiparametric Microsensors on Labonchip Systems for the Detection of Dissolved Substances

Y. Eminaga, M. Brischwein, H. Grothe, B. Wolf & J. Wiest
A microsensor chip fabricated in silicon technology was developed at the Heinz Nixdorf-Lehrstuhl für Medizinische Elekronik at Technische Universität München. This BioChip contains microsensors for measurement of pH, dissolved oxygen, bioimpedance and temperature. Furthermore it was possible to realize a new sensor for dissolved redox active substances. Using a noble metal electrode (NME) surrounding an ISFET (ion sensitive field effect transistor) pH-sensor it was possible to measure dissolved oxygen concentration indirectly via the resulting change...