4.2.5 A MEMS Based FabryPerot Protein Sensor with Reference Sensor

Hiroki Oyama, Kazuhiro Takahashi, Nobuo Misawa, Koichi Okumura, Makoto Ishida & Kazuaki Sawada
We have developed a label-free protein sensor based on a MEMS Fabry-Perot interferometer assembled with a reference protein sensor, which simultaneously measures a surface stress and transmittance change caused by immobilization of proteins. The MEMS protein sensor is composed by a silicon photodiode and a free-standing thin film with a nano cavity. A deflection of the thin film caused by an antigen-antibody reaction is detected by a photocurrent change. The MEMS protein sensor utilizes nonlinear...