5.2.3 Design and Fabrication of a Novel 3D Micropellistor

Lei Xu, Tie Li, Xiuli Gao & Yuelin Wang
This paper presents a novel 3D micropellistor based on a 3D microheater. The 3D microheater with a Pt heater embedded in a concave-shaped active area was fabricated by MEMS technology. Then a detector and a compensator was developed by sol-gel process, introducing Pd as the catalytic metal a nd porous alumna as thereference material. Test results indicate that the 3D catalytic micropellistor has a output voltage of 12 mV to 10% LEL methane. And it...