5.4.5 A Hydrogen Sulfide Sensor Based on a Surface Acoustic Wave Resonator Combined with Ionic Liquid

Yoshinobu Murakawa, Motoaki Hara, Hiroyuki Oguchi, Yuichiro Hamate & Hiroki Kuwano
This paper describes a hydrogen sulfide (H2S) gas sensor using ionic liquid (IL). In this sensor, a reservoir for the IL was integrated above a surface acoustic wave (SAW) resonator. The IL serves as an absorber for H2S gas. Mass change due to this absorption is detected as a frequency-shift of the resonance. In this study, we fabricated and demonstrated the sensor using the LiNbO3 SAW resonator with the resonant frequency of 38 MHz. The...