6.3.3 Hydrogen Sensor Using Thin Film with Interspace

Ken Sawaide, Tatsuro Yamada & Kazuhiro Hara
A Hydrogen sensor using a multiple layered thin film with an interspace is presented. The material for the sensing film is WO3-based. The sensor is highly sensitive to hydrogen gas without using any noble catalysts that are expensive and may lead to degradation of the sensitivity. The porous structure of the sensing film with an interspace in addition to the porous structure of the sensing film itself enhances the effective surface area and thus the...