7.3.4 Thin-Film Gas Sensors Operating in a Perpendicular Current Mode

Yurie Ishikawa & Kazuhiro Hara
Thin-film gas sensors operating in a perpendicular current mode are presented. To achieve this mode, a mesh-like top electrode is deposited on a sensing film instead of an electrode that is normally deposited on a substrate. The sensor current flows perpendicularly to the surface of the thin film and thus is not blocked by the cracks that are generated by an annealing process after deposition and by the difference of the thermal expansion coefficients between...