8.3.4 Improved response characteristics of SnO2 film based NO2 gas sensor with nanoscaled metal oxide catalysts

Anjali Sharma, Vinay Gupta & Monika Tomar
Gas sensor structure based on rf sputtered SnO2 thin film is found to be highly sensitive (1.4x10^4) towards 100 ppm NO2 gas, but with slow response (~4min.) and recovery (~33min.) times. To improve the response and recovery speeds of the sensor, different catalysts (WO3, TeO2, Al2O3, NiO, CuO and In2O3) in the form of nanoclusters have been deposited over SnO2 surface and their effect towards sensing response characteristics of NO2 gas has been studied. Amongst...