8.4.2 Gas Sensing Properties of Novel CuO Nanowire Devices

S. Steinhauer, E. Brunet, T. Maier, G. C. Mutinati, A. Köck & O. Freudenberg
We report on novel gas sensing devices which are realized by the on-chip synthesis of cupric oxide (CuO) nanowires during the thermal oxidation of electroplated copper microstructures. By this method, it is possible to fabricate conductometric gas sensors with an electrical resistance dominated by a multitude of suspended CuO nanowires resulting in a huge sensor surface area. For these devices, resistance changes during exposure to different oxygen concentrations, to relative humidity and to small concentrations...