8.5.4 Fabrication and Characterization of MEMS Based Optical Hydrogen Sensors

Hwan-Gil Hwang, Kang-San Kim & Gwiy-Sang Chung
This paper presents the fabrication and characterization of MEMS based optical type hydrogen sensors using transparent 3C-SiC membrane and photovoltaic effect. 3C-SiC membrane was fabricated by anisotropic etching. Gasochromic material of Pd was deposited by sputter on the 3C-SiC membrane for gas sensing layer. Pd and WO3 changes to transparency by exposure to hydrogen and the variations of light intensity generate the photovoltaic of P-N junction between N-type 3C-SiC and P-type Si. Photovoltaic increased with...