P1.0.22 Low Power Consumption Micro C2H5OH Gas Sensor based on Micro-heater and Screen Printing Technique

S. E. Moon, H-K. Lee, N-J. Choi, J. Lee, C. A. Choi, W. S. Yang, J. Kim, J. J. Jong & D-J. Yoo
Micro C2H5OH gas sensor was fabricated based on micro-heater using tin oxide nano-powders with low power consumption and high sensitivity. Semiconducting SnO2 nano-powders were synthesized via co-precipitation method, and to increase the sensitivity for alcohol gas rare metal dopants were added. In the structure of microheater, the resistances of two semi-circled Pt heaters are connected to the spreader for thermal uniformity. Based on the above design, low power consumption alcohol gas sensor was fabricated by...